ME 6260: Introduction to Microelectromechanical Systems (MEMS)
Fall 2010, Course Registration Number (CRN) 15408 (in class); 15409 (video streaming)

Northeastern University
Department of Mechanical & Industrial Engineering
Instructors: Professor George G. Adams, 617-373-3826, 203 Snell Engineering Center
Professor Nick McGruer, 617-373-2066, 326 Dana Hall
Conference Hours (Professor Adams): Mondays 10:00-11:30, Tuesdays 5:30-5:50, Wednesdays 4:00-5:00, Thursdays 10:00-11:30, 5:30-5:50.
Credit Hours: 4
Prerequisite:Graduate student status in engineering.
Meetings: The class meets from 11:45 am - 1:25 pm on Mondays and Thursdays, in 260 West Village F.
 
The first class will be on Thursday, September 9.
 
Catalog Course Description:
Provides an introduction to microelectromechanical systems (MEMS) including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics. Studies several classes of devices including inertial measurement devices, pressure sensors, RF components, and optical MEMS. Devotes the last third of the semester largely to design projects, involving design of MEMS devices to specifications in a realistic fabrication process.
 
Syllabus

Text:

Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, 2001, ISBN 0-7923-7246-8.