Journal Publications on MicroElectroMechanical Systems (MEMS)

Dr. George G. Adams

Research Summary

MEMS is a new and exciting area in mechanical engineering which uses the technology developed in the fabrication of integrated circuits in order to make micro-scale mechanical devices. MEMS devices are used in the automotive industry, in the biomedical industry, and in industrial process control. Research is primarily on microswitches and micromirrors and is in collaboration with Electruical Engineering Professors Nicol McGruer and Paul Zavracky.

A. Basu, G.G. Adams, and N.E. McGruer, “A Review of Micro-Contact Physics, Materials, and Failure Mechanisms in Direct-Contact RF MEMS Switches,” Journal of Micromechanics and Microengineering, Vol. 26, 2016, 104004. DOI: 10.1088/0960-1317/26/10/104004

A. Basu, R.P. Hennessy, G.G. Adams, and N.E. McGruer, "Hot Switching Damage Mechanisms in MEMS Contacts – Evidence and Understanding,” Journal of Micromechanics and Microengineering, Vol. 24, 2014, 105004. DOI:10.1088/0960-1317/24/10/105004

R.P. Hennessy, A. Basu, G.G. Adams, and N.E. McGruer, “Hot-switched lifetime and damage characteristics of MEMS switch contacts,” Journal of Micromechanics and Microengineering, Vol. 23, 2013, 055003. DOI:10.1088/0960-1317/23/5/055003

R.P. Hennessy, N.E. McGruer, and G.G. Adams, “Modeling of a Thermal-Electrical-Mechanical Coupled Field Contact,” Journal of Tribology, Vol. 134, 2012, 041404. DOI: 10.1115/1.4007270

L. Chen, Z.J. Guo, H. Joshi, H. Eid, G.G. Adams, and N.E. McGruer, “An Improved SPM-Based Contact Tester for the Study of Microcontacts,” Journal of Micromechanics and Microengineering, Vol. 22, 2012, 045017. DOI: 10.1088/0960-1317/22/4/045017

H. Eid, G.G. Adams, N.E. McGruer, A. Fortini, S. Buldyrev, and D. Srolovitz, “A Combined Molecular Dynamics and Finite Element Analysis of Contact and Adhesion of a Rough Sphere and a Flat Surface,” Tribology Transactions, Vol. 54, 2011, pp. 920-928. DOI: 10.1080/10402004.2011.615638

G.G. Adams and N.E. McGruer, “A Review of Adhesion in an Ohmic Microswitch,” Journal of Adhesion Science and Technology, Vol. 24, 2010, pp. 2571–2595. DOI:10.1163/016942410X508154

L. Chen, N.E. McGruer, G.G. Adams, and Y. Du, “Separation Modes in Microcontacts Identified by the Rate-Dependence of the Pull-Off Force,” Applied Physics Letters, Vol. 93, 2008, 053503, pp. 1-3. DOI:10.1063/1.2967855

Y. Du, G.G. Adams, N.E. McGruer, and I. Etsion, “A Parameter Study of Separation Modes in Adhering Microcontacts,” Journal of Applied Physics, Vol. 103, 2008, 044902, pp. 1-7. DOI: 10.1063/1.2874434

Z.J. Guo, N.E. McGruer, and G.G. Adams, “Modeling, Simulation, and Measurement of the Dynamic Performance of an Ohmic Contact, Electrostatically Actuated RF MEMS Switch,” Journal of Micromechanics and Microengineering, Vol. 17, 2007, pp. 1899-1909. DOI: 10.1088/0960-1317/17/9/019

L. Chen, H. Lee, Z. J. Guo, N.E. McGruer, K. W. Gilbert, S. Mall, K. D. Leedy, and G. G. Adams, “Contact Resistance Study of Noble Metals and Alloy Films Using a Scanning Probe Microscope Test Station,” Journal of Applied Physics, Vol. 102, 2007, 074910, pp. 1-7. DOI: 10.1063/1.2785951

Y. Du, L. Chen, N.E. McGruer, G.G. Adams, and I. Etsion, “A Finite Element Model of Loading and Unloading of an Asperity Contact with Adhesion and Plasticity, Journal of Colloid and Interface Science, Vol. 312, 2007, pp. 522-528. DOI: 10.1016/j.jcis.2007.03.040

P.M. Nieva, N.E. McGruer, and G.G. Adams, “Design and Characterization of a Micromachined Fabry-Perot Vibration Sensor for High-Temperature Applications,” Journal of Micromechanics and Microengineering, Vol. 16, 2006, pp. 2618-2631. DOI: 10.1088/0960-1317/16/12/015

K. Joudrey, G.G. Adams, and N.E. McGruer, “Design, Modeling, Fabrication and Testing of a High Aspect Ratio Electrostatic Torsional MEMS Micromirror,” Journal of Micromechanics and Microengineering, Vol. 16, No. 10, 2006, pp. 2147-2156. DOI: 10.1088/0960-1317/16/10/031

J. Johnson, G.G. Adams, and N.E. McGruer, "Determination of Intermodulation Distortion in a Contact-Type MEMS Microswitch," IEEE Transactions on Microwave Theory and Technique, Vol. 53, No. 11, 2005, pp. 3615-3620. DOI: 10.1109/TMTT.2005.855736

B. McCarthy, G.G. Adams, N.E. McGruer, and D. Potter," A Dynamic Model, Including Contact Bounce, of an Electrostatically Actuated Microswitch," Journal of Microelectromechanical Systems, Vol. 11, No. 3, 2002, pp. 276-283. DOI: 10.1109/JMEMS.2002.1007406

S. Majumder, N.E. McGruer, G.G. Adams, P.M. Zavracky, R.H. Morrison, and J. Krim, " Study of Contacts in an Electrostatically Actuated Microswitch," Sensors and Actuators, Vol. A93, 2001, pp. 19-26. DOI: 10.1016/S0924-4247(01)00627-6

P.M. Zavracky, G.G. Adams, and P.D. Aquilino, " Strain Analysis of Silicon-on-Insulator Films Produced by Zone Melting Recrystallization," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 4, No. 1, 1995, pp. 42-48. DOI: 10.1109/84.365369

Dr. George G. Adams