MEMS Research

Mechanics and Tribology of MicroElectroMechanical Systems (MEMS)

Projects are in collaboration with the MicroFabrication Laboratory (Professor Nick McGruer of the ECE Department) of Northeastern University.

Prof. George G. Adams



Summary

MEMS is a new and exciting area in mechanical engineering which uses the technology developed in the fabrication of integrated circuits in order to make micro-scale mechanical devices. MEMS devices are used in the automotive industry, in the biomedical industry, and in industrial process control. A recent study projects that the worldwide MEMS market will grow from $700 million in 1990 to $12 billion by 2010.

Master's level and doctoral level thesis topics typically involve a combination of experimental testing, design, modeling and simulation.


Research Programs in MEMS




Dr. George G. Adams