MEMS abstract
Mechanics and Tribology of MicroElectroMechanical Systems (MEMS)
Projects are in collaboration with the
MicroFabrication
Laboratory of Northeastern University.
Prof. George G. Adams
Summary
MEMS is a new and exciting area in mechanical engineering which uses the technology developed in the fabrication of integrated circuits in order to make micro-scale mechanical devices. MEMS devices are used in the automotive industry, in the biomedical industry, and in industrial process control. A recent study projects that the worldwide MEMS market will grow from $700 million in 1990 to $12 billion by 2000.
Master's level and doctoral level thesis topics typically involve a combination of experimental testing, design, modeling and simulation.
Research Programs in MEMS
Dr. George G. Adams