Mechanics and Tribology of MicroElectroMechanical Systems (MEMS)
Projects are in collaboration with the MicroFabrication Laboratory
(Professor Nick McGruer of the ECE Department) of Northeastern University.
Prof. George G. Adams
MEMS is a new and exciting area in mechanical engineering which uses the technology developed in
the fabrication of integrated circuits in order to make micro-scale mechanical devices. MEMS
devices are used in the automotive industry, in the biomedical industry, and in industrial
process control. A recent study projects that the worldwide MEMS market will grow from $700
million in 1990 to $12 billion by 2010.
Master's level and doctoral level thesis topics typically involve a combination of
experimental testing, design, modeling and simulation.
Research Programs in MEMS
Dr. George G. Adams