MEMS abstract

Mechanics and Tribology of MicroElectroMechanical Systems (MEMS)

Projects are in collaboration with the MicroFabrication Laboratory of Northeastern University.

Prof. George G. Adams



Summary

MEMS is a new and exciting area in mechanical engineering which uses the technology developed in the fabrication of integrated circuits in order to make micro-scale mechanical devices. MEMS devices are used in the automotive industry, in the biomedical industry, and in industrial process control. A recent study projects that the worldwide MEMS market will grow from $700 million in 1990 to $12 billion by 2000.

Master's level and doctoral level thesis topics typically involve a combination of experimental testing, design, modeling and simulation.


Research Programs in MEMS




Dr. George G. Adams