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Integretion of perovskite ferroelectrics by molecular
beam epitaxy on hexagonal silicon carbide There
is a growing interest for the integration of functional oxides, such as
ferroelectric barium titanate (BTO), on wide bandgap semiconductors,
such as hexagonal silicon carbide (6H-SiC), for next generation,
multifunctional electronic devices. We have recently deposited BTO
by MBE on the MgO(111)/ SiC(0001) substrate. The BTO grows as an
oriented (111) film, while BTO deposited under the same conditions on
cleaned SiC produces an amorphous film of BTO. This demonstrates the
potential of MgO as an interlayer to align more complex oxides. Figure
1 shows this RHEED pattern progression and the inset x-ray
photoelectron spectroscopy Ti 2p peak shows the proper 4+ bonding state
of the Ti.
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